Capacitive sensors for high-precision distance measurementsYour Content Goes Here
Capacitive sensors are used for high-precision distance measurement with maximum signal stability. As a technology leader with the world’s most powerful product range, Micro-Epsilon offers solutions for numerous measurement tasks. Due to their compact and robust design as well as a wide range of customization options, these systems can be flexibly integrated into various industrial applications – from high-precision machine control in the semiconductor industry to continuous process monitoring in battery production.
Characteristics
- High-precision measurement of displacement, distance, gap and thickness
- Highest resolution up to 30 picometers
- Suitable for all electrically conductive targets
- Suitable for challenging conditions: -270 to +800 °C or UHV
- Extremely stable under fluctuating temperatures
- State-of-the-art product portfolio for a wide range of applications
- Optimized sensors and controllers for OEM series applications
More precision for measuring distance, thickness and gaps
Distance measurement
Thickness measurements
Gap measurement
